A. A. Lebedev, V. Ekke, “Study of Deep-Center Density in Cathode-Sputtered SiO<nobr>$_x$</nobr> Films Depending on the Degree of Silicon Oxidation”, Fizika i Tekhnika Poluprovodnikov, 1985, Volume 19, Issue 6,Pages <nobr>1087

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Fizika i Tekhnika Poluprovodnikov, 1985 Volume 19, Issue 6, Pages 1087–1091 (Mi phts1261)

Study of Deep-Center Density in Cathode-Sputtered SiO$_x$ Films Depending on the Degree of Silicon Oxidation

A. A. Lebedev, V. Ekke