RUS  ENG
Full version
JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 1985 Volume 19, Issue 8, Pages 1375–1381 (Mi phts1339)

Capacitance Measurements of Deep-Impurity Distribution Profile and Surface Concentration in Thin Doped Layers

E. V. Astrova, A. A. Lebedev




© Steklov Math. Inst. of RAS, 2024