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// Fizika i Tekhnika Poluprovodnikov
// Archive
Fizika i Tekhnika Poluprovodnikov,
1985
Volume 19,
Issue 8,
Pages
1375–1381
(Mi phts1339)
Capacitance Measurements of Deep-Impurity Distribution Profile and Surface Concentration in Thin Doped Layers
E. V. Astrova
,
A. A. Lebedev
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Steklov Math. Inst. of RAS
, 2024