I. N. Smirnov, A. I. Ponomarev, V. N. Shchemelev, “On the Nature of Radiation-Induced Damage under the Bombardment of Silicon by Boron Ions”, Fizika i Tekhnika Poluprovodnikov, 1984, Volume 18, Issue 4,Pages <nobr>680

On the Nature of Radiation-Induced Damage under the Bombardment of Silicon by Boron Ions

I. N. Smirnov, A. I. Ponomarev, V. N. Shchemelev

Leningrad State University named after A. A. Zhdanova

UDC: 621.315.592

Received: 05.06.1983
Accepted: 26.11.1983