M. I. Sverdlov, V. Ya. Filipchenko, “Study of Epitaxial Heterostructures of the Al$-$Ga$-$As System by Induced-Current Mode in SEM”, Fizika i Tekhnika Poluprovodnikov, 1984, Volume 18, Issue 5,Pages 787

JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 1984 Volume 18, Issue 5, Pages 787–792 (Mi phts1735)

Study of Epitaxial Heterostructures of the Al$-$Ga$-$As System by Induced-Current Mode in SEM

M. I. Sverdlov, V. Ya. Filipchenko

UDC: 621.315.592

Received: 28.04.1983
Accepted: 29.08.1983

Fulltext: PDF file (1332 kB)