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// Fizika i Tekhnika Poluprovodnikov
// Archive
Fizika i Tekhnika Poluprovodnikov,
1984
Volume 18,
Issue 5,
Pages
797–801
(Mi phts1737)
Diffusion Near-to-Surface Impurity Profiles in Semiconductors. III. Comparison with the Experiment
V. I. Fistul
,
M. I. Sinder
M. V. Lomonosov Moscow Institute of Fine Chemical Technology
UDC:
621.315.592
Received:
09.11.1983
Accepted:
14.11.1983
Fulltext:
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Steklov Math. Inst. of RAS
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