A. G. Ital'yantsev, V. N. Mordkovich, E. M. Temper, “On the Role of Athermic Processes in Pulsed Annealing of Ion-Doped Si Layers”, Fizika i Tekhnika Poluprovodnikov, 1984, Volume 18, Issue 5,Pages <nobr>928

JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 1984 Volume 18, Issue 5, Pages 928–930 (Mi phts1763)

Short Notes

On the Role of Athermic Processes in Pulsed Annealing of Ion-Doped Si Layers

A. G. Ital'yantsev, V. N. Mordkovich, E. M. Temper

UDC: 621.315.592

Received: 05.12.1983
Accepted: 07.12.1983

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