Special Features of Formation and Annealing of Radiation-Indiced Defects in Si due to Interaction with the Surface

V. I. Kuznetsov, P. F. Lugakov, A. V. Tsikunov

V. I. Lenin Belorusskii State University

UDC: 621.315.592

Received: 22.07.1983
Accepted: 27.12.1983