Short Notes

Study of the Effect of Silicon-Carbide Ion Implantation and Annealing Modes on Crystal Structure and Resistance of $p$-Type Layers

V. A. Gudkov, G. A. Krysov, V. V. Makarov

Leningrad Polytechnical Institute

UDC: 621.315.592

Received: 22.08.1983
Accepted: 02.12.1983