Variation of Paramagnetic-Center Concentration in $a$-Si Films Deposited in Vacuum under Ionic Irradiation

L. J. Ргаnyavichyus, S. I. Tamulevichus, J. I. Naktinis

Kaunas University of Technology

UDC: 621.315.592

Received: 15.09.1983
Accepted: 07.02.1984