Damage ol GaAs under the Implantation of Al$^{+}$ and $P^{+}$ with Different Ionic-Current Densities

I. S. Tashlykov, G. Karteer, M. Nobs

A. N. Sevchenko Research Institute of Applied Physical Problems, Belarusian State University, Minsk

UDC: 621.315.592

Received: 05.05.1985
Accepted: 01.08.1985