M. I. Sverdlov, V. Ya. Filipchenko, O. L. Chernov, “Peculiarities of Electron-Probe Analysis of <nobr>$p{-}n$</nobr> Structures Using the Dependence of Induced Current on Accelerating Voltage”, Fizika i Tekhnika Poluprovodnikov, 1986, Volume 20, Issue 5,Pages <nobr>799

Peculiarities of Electron-Probe Analysis of $p{-}n$ Structures Using the Dependence of Induced Current on Accelerating Voltage

M. I. Sverdlov, V. Ya. Filipchenko, O. L. Chernov

UDC: 621.315.592

Received: 19.08.1985
Accepted: 16.10.1985