Photoelectric and Optical Properties of $a$-Si : H Films with Phosphorus and Boron Implanted Ions

I. P. Akimchenko, V. S. Vavilov, A. N. Karryev, I. A. Kurova, K. B. Chitaya

P. N. Lebedev Physical Institute, the USSR Academy of Sciences, Moscow

UDC: 621.315.592

Received: 04.11.1985
Accepted: 10.11.1985