Short Notes

Effect of Annealing on Electron-Microscopic Image and DLTS Spectrum of Dislocations in Deformed Silicon

V. V. Aristov, P. Verner, I. I. Snigireva, I. I. Khodos, E. B. Yakimov, N. A. Yarykin

Institute of Microelectronics Technology and High-Purity Materials RAS

UDC: 621.315.592

Received: 22.07.1985
Accepted: 16.10.1985