V. G. Litovchenko, B. N. Romanyuk, R. I. Marchenko, I. V. Rudskoi, V. P. Shapovalov, G. K. Zholudev, “Study of Defect-Formation Processes in Implanted Structures under Epitaxial Film Growth”, Fizika i Tekhnika Poluprovodnikov, 1986, Volume 20, Issue 7,Pages <nobr>1174

Study of Defect-Formation Processes in Implanted Structures under Epitaxial Film Growth

V. G. Litovchenko^a, B. N. Romanyuk^a, R. I. Marchenko^a, I. V. Rudskoi^a, V. P. Shapovalov, G. K. Zholudev^a

^a Institute of Semiconductors of the Academy of Sciences of the Ukrainian SSR

UDC: 621.315.592

Received: 01.08.1985
Accepted: 27.11.1985