V. V. Bolotov, G. L. Plotnikov, V. M. Emeksuzyan, K. Shmal'ts, “Passivation of radiation-induced defects in silicon hydrogenated layers under neutron irradiation”, Fizika i Tekhnika Poluprovodnikov, 1992, Volume 26, Issue 7,Pages <nobr>1295

Passivation of radiation-induced defects in silicon hydrogenated layers under neutron irradiation

V. V. Bolotov, G. L. Plotnikov^a, V. M. Emeksuzyan^a, K. Shmal'ts^a

^a Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk

Received: 11.10.1991
Accepted: 02.03.1992