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Fizika i Tekhnika Poluprovodnikov, 2021 Volume 55, Issue 11, Pages 989–994 (Mi phts4932)

This article is cited in 1 paper

XXV International Symposium "Nanophysics and Nanoelectronics", Nizhny Novgorod, March 9-12, 2021

3.3 THz quantum cascade laser based on a three GaAs/AlGaAs quantum-well active module with an operating temperature above 120 K

R. A. Khabibullinab, K. V. Marem'yanincd, D. S. Ponomareva, R. R. Galievab, A. A. Zaitseve, A. I. Danilovf, I. S. Vasil'evskiig, A. N. Vinichenkog, A. N. Klochkovg, A. A. Afonenkoh, D. V. Ushakovh, S. V. Morozovcd, V. I. Gavrilenkocd

a V. G. Mokerov Institute of Ultra High Frequency Semiconductor Electronics of RAS, Moscow
b Ioffe Institute, St. Petersburg
c Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
d Lobachevsky State University of Nizhny Novgorod
e National Research University of Electronic Technology
f Polyus Research and Development Institute named after M. F. Stel'makh, Moscow
g National Engineering Physics Institute "MEPhI", Moscow
h Belarusian State University, Minsk

Abstract: In this work, we have optimized the THz QCL design with an active module based on three GaAs/Al$_{0.18}$Ga$_{0.82}$As quantum wells for high-temperature generation at a frequency of about 3.3 THz. A heterostructure based on the developed design with an active region thickness of 10 $\mu$m was grown by molecular beam epitaxy with a deviation of the active module thickness from the nominal less than 1%. The fabricated THz QCLs with a double metal waveguide demonstrate lasing up to a temperature of 125 K. Investigations of the I–V characteristics, the dependences of the integrated radiation on the current and the lasing spectra showed good agreement with the calculated characteristics.

Keywords: quantum cascade laser, terahertz range, quantum well, molecular beam epitaxy.

Received: 18.05.2021
Revised: 25.05.2021
Accepted: 25.05.2021

DOI: 10.21883/FTP.2021.11.51551.46


 English version:
DOI: 10.1134/S1063782622010080

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© Steklov Math. Inst. of RAS, 2025