M. M. Anikin, A. A. Lebedev, A. A. Lebedev, A. L. Syrkin, A. V. Suvorov, “Capacity Spectroscopy of p${-}$n Junctions Based on Epitaxial $4H$-SiC Produced by Ionic Implantation of Al”, Fizika i Tekhnika Poluprovodnikov, 1986, Volume 20, Issue 12,Pages 2169

JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 1986 Volume 20, Issue 12, Pages 2169–2172 (Mi phts495)

Capacity Spectroscopy of p${-}$n Junctions Based on Epitaxial $4H$-SiC Produced by Ionic Implantation of Al

M. M. Anikin, A. A. Lebedev, A. A. Lebedev, A. L. Syrkin, A. V. Suvorov