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Fizika i Tekhnika Poluprovodnikov, 2021 Volume 55, Issue 10, Pages 932–936 (Mi phts4966)

Surface, interfaces, thin films

Silicon-doped GaSb grown by MOVPE in a wide range of the V/III ratio

R. V. Levin, A. S. Vlasov, B. V. Pushnii

Ioffe Institute, St. Petersburg

Abstract: Charachterization of Si-doped GaSb epitaxial layers grown by metal organic vapor phase epitaxy is presented. Samples are grown at constant SiH$_4$ flow with a TMSb/TEGa ratio ranged from 1 to 50. X-ray diffraction, Raman scattering, photoluminescence, resistivity, free carrier concentration and their mobility are studied.

Keywords: metal-organic vapor-phase epitaxy, TMSb/TEGa ratio, epitaxial layer, gallium antimonide, silicon doping.

Received: 13.05.2021
Revised: 25.05.2021
Accepted: 25.05.2021

DOI: 10.21883/FTP.2021.10.51447.9678


 English version:
Semiconductors, 2021, 55:11, 850–854

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© Steklov Math. Inst. of RAS, 2024