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Fizika i Tekhnika Poluprovodnikov, 2020 Volume 54, Issue 12, Pages 1309–1319 (Mi phts5105)

This article is cited in 9 papers

Surface, interfaces, thin films

Effect of the substrate nature on the CdPbS film composition and mechanical stresses at the “film–substrate” interface

L. N. Maskaevaa, A. V. Pozdina, V. F. Markovab, V. I. Voroninc

a Ural Federal University named after the First President of Russia B. N. Yeltsin, Ekaterinburg
b Ural Institute of the State Fire Service
c Institute of Metal Physics, Ural Division of the Russian Academy of Sciences, Ekaterinburg

Abstract: The role of substrates of different natures on the phase composition, morphology, and mechanical stresses at the “film–substrate” interface during the chemical deposition of CdPbS layers on silicon (111), glass ceramics, fused quartz, an indium–tin–oxide (ITO) coating, slide glass, and porous glass is studied. It is assumed that the revealed features are associated with different conditions of film nucleation and growth. It is found that a single-phase Cd$_{x}$Pb$_{1-x}$S solid solution film is formed on fused quartz, in contrast to other substrates on which layers containing additionally from 2 to 8 mol% of the X-ray amorphous CdS phase are deposited. It is shown that an increase in mechanical compressive stresses at the “film–substrate” interface from -9.32 to -121.79 kN/m$^2$ in the series porous glass–object glass–glass ceramics–silicon (111)–fused silica is asymbatic to the thermal-expansion coefficients of these substrate materials.

Keywords: chemical deposition, thin films, Cd$_{x}$Pb$_{1-x}$S solid solutions, mechanical compressive stresses.

Received: 17.08.2020
Revised: 24.08.2020
Accepted: 24.08.2020

DOI: 10.21883/FTP.2020.12.50230.9506


 English version:
Semiconductors, 2020, 54:12, 1567–1576

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