Synthesis of silicon carbide nanoparticles by laser pyrolysis of a mixture of monosilane and acetylene

The conditions of the laser-stimulated synthesis reaction of silicon-carbide nanoparticles are determined and their characterization is performed. The laser synthesis reaction of SiC particles in the gas phase is observed with the SiH$_{4}$/C$_{2}$H$_{2}$ flow ratio in the range of 1.6–3.2. The temperature in the reaction-zone region is $\sim$1400–1500$^\circ$C. Silicon-carbide nanoparticles $\sim$6 nm in diameter are fabricated and their composition is investigated.