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Fizika i Tekhnika Poluprovodnikov, 2020 Volume 54, Issue 10, Pages 1035–1040 (Mi phts5135)

This article is cited in 2 papers

Micro- and nanocrystalline, porous, composite semiconductors

Effect of ultraviolet radiation and electric field on the conductivity of structures based on $\alpha$- and $\varepsilon$-Ga$_{2}$O$_{3}$

V. M. Kalyginaa, V. I. Nikolaevbc, A. V. Almaeva, A. V. Tsymbalova, V. V. Kopyeva, Yu. S. Petrovaa, I. A. Pechnikovc, P. N. Butenkoc

a Tomsk State University
b Perfect Crystals LLC, 194064, St. Petersburg, Russia
c Ioffe Institute, St. Petersburg

Abstract: The influence of ultraviolet radiation and a strong electric field on the current-voltage characteristic of resistive structures based on polymorphic films of gallium oxide is studied. Both types of Ga$_{2}$O$_{3}$ films were obtained by the method of chloride vapor-phase epitaxy on smooth and structured sapphire substrates with orientation (0001). In the same process $\alpha$-Ga$_{2}$O$_{3}$ films were deposited on smooth substrates, and gallium oxide films, with regular structures perpendicular to the substrate, containing alternating regions of the $\alpha$- and $\varepsilon$-phases were deposited on patterned substrate. It's was observed, that radiation with $\lambda$ = 254 nm and strong electric transfer structures from a state with low resistance to a state with high resistance. The response time to UV radiation is 5 seconds, and the recovery time less than 1 s.

Keywords: gallium oxide, HVPE, polymorphism, ultraviolet, volt-ampere characteristics.

Received: 27.05.2020
Revised: 02.06.2020
Accepted: 02.06.2020

DOI: 10.21883/FTP.2020.10.49940.9449


 English version:
Semiconductors, 2020, 54:10, 1224–1229

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© Steklov Math. Inst. of RAS, 2024