Formation of ohmic contacts to a diamond-like carbon layer deposited on a dielectric diamond substrate

The fabrication process of ohmic contacts to a diamond-like carbon (DLC) layer is described with the sequential deposition of a Au/Mo/Ti metallic layer onto it. The contacts have good mechanical and adhesion properties. Their specific contact resistance is varied from 1.4 $\times$ 10$^-4$ to 6.4 $\times$ 10$^{-5}$ $\Omega$ cm$^2$ depending on the DLC layer thickness. The temperature dependence of the layer film resistance is investigated. It is shown that thin DLC layers provide better characteristics of an ohmic contact due to their more uniform graphitization during thermal annealing.