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Fizika i Tekhnika Poluprovodnikov, 2020 Volume 54, Issue 4, Pages 376–387 (Mi phts5247)

This article is cited in 6 papers

Micro- and nanocrystalline, porous, composite semiconductors

Study of the properties of two-dimensional 野S$_{2}$ and WS$_{2}$ films synthesized by chemical-vapor deposition

S. A. Smagulovaa, P. V. Vinokurova, A. A. Semyonovaa, E. I. Popovaa, F. D. Vasylievaa, E. D. Obraztsovabc, P. V. Fedotovbc, I. V. Antonovad

a North-Eastern Federal University named after M. K. Ammosov
b Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow
c Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region
d Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk

Abstract: Molybdenum- and tungsten-disulfide films are synthesized by chemical-vapor deposition. The set of optimal synthesis parameters (temperature, time, and amount and ratio of precursors) is established at which 野S$_{2}$ domains with maximum lateral sizes of up to 250 $\mu$m on sapphire and 野S$_{2}$ and WS$_{2}$ domains up to 80 $\mu$m in size on SiO$_2$ can be grown. Domain intergrowth leads to the formation of homogeneous single-layer 野S$_{2}$ films. The Raman spectra of the synthesized films contain two characteristic peaks corresponding to the atomic vibrations in 野S$_{2}$ and WS$_{2}$. Photoluminescence of the single-layer and bilayer 野S$_{2}$ films with a maximum intensity of 670 $\pm$ 2 nm and of the single-layer WS$_2$ films with a maximum intensity of 630 $\pm$ 2 nm is detected. The photoluminescence spectral maps (the dependences of the photoluminescence intensity on the luminescence and excitation-light wavelengths) are measured. According to the measured data, the photoluminescence excitation spectrum of 野S$_{2}$ has a maximum at 350 $\pm$ 5 nm and the photoluminescence excitation spectrum of WS$_{2}$ has a maximum at 330 $\pm$ 5 nm. The I – V characteristics of the synthesized films are photosensitive in the visible spectral range.

Keywords: graphene, molybdenum and tungsten disulfides, CVD method, optical properties.

Received: 10.12.2019
Revised: 16.12.2019
Accepted: 16.12.2019

DOI: 10.21883/FTP.2020.04.49145.9332


 English version:
Semiconductors, 2020, 54:4, 454–464

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