RUS  ENG
Full version
JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 2019 Volume 53, Issue 12, Pages 1681–1685 (Mi phts5335)

This article is cited in 1 paper

Carbon systems

Edge doping in graphene devices on SiO$_{2}$ substrates

G. Yu. Vasil'evaa, D. Smirnovb, Yu. B. Vasil'eva, A. A. Greshnova, R. J. Haugb

a Ioffe Institute, St. Petersburg
b Institut fur Festkorperphysik, Leibniz Universitat Hannover, Hannover, Germany

Abstract: The conductivity of single layer and bilayer graphene ribbons 0.5–4 $\mu$m in width fabricated by oxygen plasma etching is studied experimentally. The dependence of the electron concentration in graphene on the ribbon width is revealed. This effect is explained by the edge doping of graphene due to defects arranged in SiO$_{2}$ near the ribbon edges. The method of the formation of abrupt $p$$n$ junctions in graphene and structures with a constant electron concentration gradient in the graphene plane with the help of edge doping is proposed.

Keywords: graphene, edge doping, substrate, defects, plasma etching.

Received: 29.04.2019
Revised: 06.05.2019
Accepted: 06.05.2019

DOI: 10.21883/FTP.2019.12.48627.9151


 English version:
Semiconductors, 2019, 53:12, 1672–1676

Bibliographic databases:


© Steklov Math. Inst. of RAS, 2024