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JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 2019 Volume 53, Issue 11, Pages 1593–1596 (Mi phts5370)

This article is cited in 9 papers

Manufacturing, processing, testing of materials and structures

Raman scattering in AlN crystals grown by sublimation on SiC è AlN seeds

I. D. Breeva, A. N. Anisimova, A. A. Vol'fsona, O. P. Kazarovaa, E. N. Mokhovb

a Ioffe Institute, St. Petersburg
b St. Petersburg National Research University of Information Technologies, Mechanics and Optics

Abstract: The Raman-scattering technique is used to analyze the structural quality of bulk AlN crystals grown by sublimation on SiC and AlN seeds. Growth on SiC seeds is conducted with retention of the SiC seed during growth (type 1) and with total evaporation of the SiC seed (type 2). Growth on AlN seeds is conducted in tungsten containers with no graphite parts (type 3). According to the analysis of Raman spectra, the highest quality is inherent in type-3 crystals that exhibit minimal full widths at half maximum of Raman lines. The experimentally observed specific features are defined by differences in the mechanism of growth and by the content of dopant impurities in the crystals grown.

Keywords: AlN, sublimation sandwich method, Raman scattering.

Received: 28.05.2019
Revised: 03.06.2019
Accepted: 03.06.2019

DOI: 10.21883/FTP.2019.11.48461.9171


 English version:
Semiconductors, 2019, 53:11, 1558–1561

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