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Fizika i Tekhnika Poluprovodnikov, 2019 Volume 53, Issue 9, Pages 1271–1274 (Mi phts5415)

This article is cited in 1 paper

XXIII International symposium ''Nanophysics and Nanoelectronics'', Nizhny Novgorod, March 11–14, 2019

Studies of the cross section and photoluminescence of a GaAs layer grown on a Si/Al$_{2}$O$_{3}$ substrate

A. A. Sushkov, D. A. Pavlov, V. G. Shengurov, S. A. Denisov, V. Yu. Chalkov, N. V. Baidus, A. V. Rykov, R. N. Kriukov

National Research Lobachevsky State University of Nizhny Novgorod

Abstract: A GaAs/AlAs/GaAs/AlAs/Ge heterostructure grown on a Si/Al$_{2}$O$_{3}$(1$\bar {1}$02) substrate is formed and studied. The Ge buffer layer is produced by the “hot wire” technique, whereas the III–V layers are grown by metal–organic vapor-phase epitaxy. The optical quality of the III–V layers is determined by photoluminescence spectroscopy. Structural studies are performed by high-resolution transmission electron microscopy. The elemental composition is determined by energy-dispersive X-ray spectroscopy. In the study, the possibility of growing a single-crystal GaAs layer on a Si/Al$_2$O$_3$ substrate through AlAs/GaAs/AlAs/Ge buffer layers is shown.

Keywords: heteroepitaxy, transmission electron microscopy, sapphire substrate, GaAs layer, photoluminescence spectra.

Received: 24.04.2019
Revised: 29.04.2019
Accepted: 29.04.2019

DOI: 10.21883/FTP.2019.09.48137.20


 English version:
Semiconductors, 2019, 53:9, 1242–1245

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