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Fizika i Tekhnika Poluprovodnikov, 2019 Volume 53, Issue 9, Pages 1293–1296 (Mi phts5420)

XXIII International symposium ''Nanophysics and Nanoelectronics'', Nizhny Novgorod, March 11–14, 2019

Enhanced photoluminescence of heavily doped $n$-Ge/Si(001) layers

D. S. Prokhorova, V. G. Shengurova, S. A. Denisova, D. O. Filatova, A. V. Zdoroveyshcheva, V. Yu. Chalkova, A. V. Zaitseva, M. V. Veda, M. V. Dorokhina, N. A. Baidakovab

a Lobachevsky State University of Nizhny Novgorod
b Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod

Abstract: The photoluminescence spectra of epitaxial $n^+$-Ge:P/Si(001) structures are studied. The structures are grown by hot-wire chemical vapor deposition and doped with phosphorus to the maximum electron concentration 1 $\times$ 10$^{20}$ cm$^{-3}$ from a source based on thermally decomposed GaP. The effects of the doping level and rapid thermal annealing of $n^+$-Ge:P layers on the photoluminescence spectra are studied. It is demonstrated that the epitaxial $n^+$-Ge:P/Si(001) layers grown by hot-wire chemical vapor deposition are promising for application as active regions of light-emitting optoelectronic devices operating in the near-infrared spectral region.

Keywords: epitaxial germanium layers on silicon, hot-wire chemical vapor deposition, doping, photoluminescence.

Received: 24.04.2019
Revised: 29.04.2019
Accepted: 29.04.2019

DOI: 10.21883/FTP.2019.09.48142.26


 English version:
Semiconductors, 2019, 53:9, 1262–1265

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