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Fizika i Tekhnika Poluprovodnikov, 2019 Volume 53, Issue 8, Pages 1159–1163 (Mi phts5445)

This article is cited in 6 papers

Manufacturing, processing, testing of materials and structures

Submonolayer InGaAs/GaAs quantum dots grown by MOCVD

V. Ya. Aleshkina, N. V. Baidusb, A. A. Dubinova, K. E. Kudryavtseva, S. M. Nekorkinb, A. V. Kruglovb, D. G. Reunovb

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b National Research Lobachevsky State University of Nizhny Novgorod

Abstract: The mode of the growth of InGaAs quantum dots by MOS-hydride epitaxy on GaAs substrates without a deviation and with a deviation of 2$^{\circ}$ is selected for laser structures emitting at wavelengths above 1.2 $\mu$m at room temperature. As a result, a quantum-dot density of 4 $\times$ 10$^{10}$ cm$^{-2}$ is achieved. Stimulated emission is observed in laser structures with seven layers of quantum dots at a wavelength of 1.06 $\mu$m at liquid-nitrogen temperature. The threshold power density of optical pumping is about 5 kW/cm$^2$.

Keywords: quantum dots, MOS-hydride epitaxy, GaAs/InGaAs.

Received: 01.04.2019
Revised: 11.04.2019
Accepted: 11.04.2019

DOI: 10.21883/FTP.2019.08.48011.9124


 English version:
Semiconductors, 2019, 53:8, 1138–1142

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