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JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 2019 Volume 53, Issue 7, Pages 903–907 (Mi phts5453)

This article is cited in 1 paper

Surface, interfaces, thin films

On the properties of isoparametric AlInGaAsP/InP heterostructures

D. L. Alfimova, L. S. Lunin, M. L. Lunina, A. S. Pashchenko, È. M. Danilina

Federal Research Center, Southern Scientific Center, Russian Academy of Sciences, Rostov-on-Don, Russia

Abstract: The paper discusses the influence of growth conditions on the structural perfection of AlInGaAsP/InP thin-film heterostructures. The main parameters determining the structural perfection and surface quality of thin AlInGaAsP epitaxial films grown on indium phosphide substrates from the liquid phase in the temperature gradiend field are determined.

Received: 17.12.2018
Revised: 25.01.2019
Accepted: 30.01.2019

DOI: 10.21883/FTP.2019.07.47865.9045


 English version:
Semiconductors, 2019, 53:7, 887–891

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