Abstract:
The characteristics of semiconductor chip modulators providing the angular deflection of a laser beam due to all-electric modulation of the optical characteristics of a semiconductor heterostructure are theoretically studied. Designs for quantum-confined semiconductor waveguide heterostructures with a distributed Bragg reflector integrated on the heterostructure surface are developed. The design of a waveguide structure including 20 periods of coupled asymmetric quantum wells, which provide an optical confinement factor of the waveguide mode of 20%, and an optimized doping profile allowing a uniform electric-field distribution to be maintained in the quantum-well region in the entire range of operating voltages are proposed. In this waveguide structure, the change in the refractive index due to the quantum-confined Stark effect reaches 0.086 when the control signal changes from 0 to 6 V. It is shown that the spatial (angular) scanning of the laser beam emitted from the surface of a distributed Bragg mirror with a divergence of less than 0.1$^{\circ}$ in the range of 1$^{\circ}$–2$^{\circ}$ is feasible for the proposed waveguide structure design.