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Fizika i Tekhnika Poluprovodnikov, 2018 Volume 52, Issue 12, Pages 1499–1502 (Mi phts5667)

This article is cited in 1 paper

Semiconductor structures, low-dimensional systems, quantum phenomena

Ridge waveguide structure for lattice-matched quantum cascade lasers

V. V. Mamutin, N. D. Il'inskaya, A. A. Usikova, A. V. Lyutetskiy

Ioffe Institute, St. Petersburg

Abstract: The fabrication and investigation of the ridge waveguide structure for a quantum cascade laser on an indium phosphide substrate intended for a wavelength of 4.8 $\mu$m, which corresponds to one of the atmospheric transparency windows, is calculated. The heterostructure is grown by molecular-beam epitaxy and consists of 30 cascades. Post-growth treatment is performed by photolithography using Russian equipment. The fabricated ridge waveguide structure allowed lasing to be attained at the required wavelength at room temperature.

Keywords: Ridge Waveguide Structure, Quantum Cascade Lasers (QCL), Post-growth Treatment, Atmospheric Transparency Window, Indium Phosphide.

Received: 23.05.2018
Accepted: 28.05.2018

DOI: 10.21883/FTP.2018.12.46764.8916


 English version:
Semiconductors, 2018, 52:12, 1603–1606

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