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JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 2018 Volume 52, Issue 10, Pages 1228–1236 (Mi phts5720)

This article is cited in 11 papers

Manufacturing, processing, testing of materials and structures

Study of the effective refractive index profile in self-assembling nanostructured ITO films

L. K. Markov, A. S. Pavluchenko, I. Yu. Smirnova, S. I. Pavlov

Ioffe Institute, St. Petersburg

Abstract: The optical characteristics and structural features of self-assembling nanostructured indium–tin oxide (ITO) films deposited onto substrates heated above 400$^{\circ}$C are studied. Estimations of the distribution profiles of the material and effective refractive index in the films under study are obtained by computer simulation of a medium having spectral dependences of light transmission and reflection coefficients closest to those observed in the experiment. These results are in good agreement with scanning electron microscopy data for these films and make it possible to not only confirm the gradient character of such coatings but also restore some of its features. The further overgrowth of voids in self-assembling nanostructured films by means of the deposition of an additional material amount by magnetron sputtering at room temperature leads to a variation in the effective refractive index profile in them. Thus, it is possible to form transparent conductive films with an efficient refractive index profile adjusted for specific tasks. Adjustment of the refractive index profile in self-assembled ITO films acquires a special value for designing coatings with specified properties by virtue of a limited set of transparent conductive materials.

Keywords: Effective Refractive Index Profile, Quality Gradient, Filamentary Crystals, Above-described Technology, Self-assembled Coatings.

Received: 26.02.2018
Accepted: 12.03.2018

DOI: 10.21883/FTP.2018.10.46466.8853


 English version:
Semiconductors, 2018, 52:10, 1349–1356

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© Steklov Math. Inst. of RAS, 2024