RUS  ENG
Full version
JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 2018 Volume 52, Issue 9, Pages 1104–1106 (Mi phts5746)

This article is cited in 2 papers

Manufacturing, processing, testing of materials and structures

Raman spectra of thick epitaxial GaN layers formed on SiC by the sublimation sandwich method

A. N. Anisimova, A. A. Vol'fsona, E. N. Mokhovb

a Ioffe Institute, St. Petersburg
b St. Petersburg National Research University of Information Technologies, Mechanics and Optics

Abstract: The Raman spectra of thick ($\sim$100 $\mu$m and more) GaN layers grown on crystalline SiC substrates by the sublimation sandwich method are studied. Good agreement between the spectra of the SiC substrates used in the study and published data indicates that the measurements made in the study are reliable. The minimum difference between the results of the measurements and published evidence for GaN layers means that the layers grown by the sublimation sandwich method in the study compare well with those fabricated by the metalorganic vapor phase epitaxy (MOVPE) or chloride-hydride vapor phase epitaxy (CHVPE) techniques.

Keywords: Sublimation Sandwich Method (SSM), Raman Spectra, Chloride Hydride Vapor Phase Epitaxy (CHVPE), Metalorganic Vapor Phase Epitaxy (MOVPE), Gallium Nitride.

Received: 15.02.2018
Accepted: 22.03.2018

DOI: 10.21883/FTP.2018.09.46283.8845


 English version:
Semiconductors, 2018, 52:9, 1225–1227

Bibliographic databases:


© Steklov Math. Inst. of RAS, 2024