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Fizika i Tekhnika Poluprovodnikov, 2017 Volume 51, Issue 8, Pages 1146–1150 (Mi phts6084)

This article is cited in 8 papers

Manufacturing, processing, testing of materials and structures

InSb quantum dots produced by liquid-phase epitaxy on InGaAsSb/GaSb substrates

L. A. Sokura, Ya. A. Parkhomenko, K. D. Moiseev, V. N. Nevedomskiy, N. A. Bert

Ioffe Institute, St. Petersburg

Abstract: Indium-antimonide quantum dots are for the first time formed on the surface of an epitaxial In$_{0.25}$GaAsSb layer isoperiodic to a GaSb(001) substrate by liquid-phase epitaxy in the range of temperatures $T$ = 450–467$^\circ$C. Transmission electron microscopy shows that, the shape of quantum dots is close to a truncated cone and their distribution in terms of height and base size in the ensemble is monomodal. Large-sized quantum dots (with a base size of 30–50 nm and height of 3 nm) exhibit specific contrast in the plane-view diffraction-mode image, which is indicative of the presence of misfit defects. Modification of the chemical composition of the working surface of the substrate by the deposition of an epitaxial In$_{0.25}$GaAsSb layer makes possible a threefold increase in the density of the ensemble of InSb quantum dots (1 $\times$ 10$^{10}$ cm$^{-2}$) compared to the density in the case of deposition directly onto the GaSb binary compound.

Received: 31.01.2017
Accepted: 15.02.2017

DOI: 10.21883/FTP.2017.08.44804.8533


 English version:
Semiconductors, 2017, 51:8, 1101–1105

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