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JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 2017 Volume 51, Issue 6, Pages 844–849 (Mi phts6144)

This article is cited in 4 papers

Manufacturing, processing, testing of materials and structures

Influence of a static magnetic field on the formation of silicide phases in a Cu/Si(100) structure upon isothermal annealing

È. Yu. Buchin, V. V. Naumov, S. V. Vasilev

Yaroslavl branch of the Institute of physics and technology, Institution of Russian academy of sciences

Abstract: It is experimentally shown that the process of the solid-phase synthesis of copper silicide is sensitive to magnetic fields. Upon low-temperature vacuum annealing of a Cu/Si(100) thin-film structure, a static magnetic field with moderate strength stimulates the alloying of silicon in copper and suppresses synthesis of the Cu$_3$Si phase.

Received: 26.07.2016
Accepted: 28.11.2016

DOI: 10.21883/FTP.2017.06.44566.8379


 English version:
Semiconductors, 2017, 51:6, 812–816

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