P. A. Yunin, Yu. N. Drozdov, V. V. Chernov, V. A. Isaev, S. A. Bogdanov, A. B. Muchnikov, “Formation of singular (001) terraces on the surface of single-crystal HPHT diamond substrates”, Fizika i Tekhnika Poluprovodnikov, 2016, Volume 50, Issue 12,Pages <nobr>1647

This article is cited in 3 papers

XX International Symposium ''Nanophysics and Nanoelectronics'', Nizhny Novgorod, March 14-18, 2016

Formation of singular (001) terraces on the surface of single-crystal HPHT diamond substrates

P. A. Yunin^abc, Yu. N. Drozdov^ba, V. V. Chernov^c, V. A. Isaev^c, S. A. Bogdanov^c, A. B. Muchnikov^c

^a Lobachevsky State University of Nizhny Novgorod
^b Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
^c Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod

Abstract: Methods of the experimental diagnostics and control of the misorientation angle for single-crystal HPHT (High Pressure High Temperature) diamond substrates are discussed. Such substrates are used for the homoepitaxial growth of doped and undoped CVD diamond layers. The formation of singular (001) terraces on the surface of HPHT diamond after microwave-discharge-plasma etching in pure hydrogen or a hydrogen–oxygen mixture is observed. This phenomenon can be used for rapid determination of the substrate misorientation and to improve the control precision of the deviation angle during substrate polishing, or for obtaining large singular (001) areas of single-crystal diamond substrates.

Received: 27.04.2016
Accepted: 10.05.2016