Abstract:
The results of experimental studies of the parameters of GaN and GaAs structures before and after $\gamma$-neutron irradiation are reported. A special set of test diodes making it possible to reduce the error in the results of measuring the parameters of the structures, which is important in the design and optimization of the structure of semiconductor devices, is suggested.
Keywords:GaAs, Electron Distribution, Radiation Defect, Semiconductor Structure, Doping Profile.