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JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive
Fizika i Tekhnika Poluprovodnikov, 1986 Volume 20, Issue 2, Pages 304–308 (Mi phts66)
Algorithm of Diffusion Impurity Profile Construction by Graphs for Semiconductors

M. I. Sinder

Kalininsky State University

UDC: 621.315.592

Received: 28.05.1985
Accepted: 06.09.1985


© Steklov Math. Inst. of RAS, 2024