I. S. Tashlykov, T. V. Pozdeeva, Z. Kalbittser, “On the Role of Impurity Nature in the Damage of GaAs Implanted by Al$^{+}$ and P$^{+}$ Ions”, Fizika i Tekhnika Poluprovodnikov, 1987, Volume 21, Issue 4,Pages 728

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Fizika i Tekhnika Poluprovodnikov, 1987 Volume 21, Issue 4, Pages 728–729 (Mi phts668)

Short Notes

On the Role of Impurity Nature in the Damage of GaAs Implanted by Al$^{+}$ and P$^{+}$ Ions

I. S. Tashlykov, T. V. Pozdeeva, Z. Kalbittser

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