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Fizika i Tekhnika Poluprovodnikov, 2020 Volume 54, Issue 12, Page 1383 (Mi phts6682)

NANOSTRUCTURES : PHYSICS AND TECHNOLOGY 28th International Symposium (Minsk, Republic of Belarus, September, 2020)
Graphene

Comparative study of conventional and quasi-freestanding epitaxial graphenes grown on 4$H$-SiC substrate

S. P. Lebedeva, I. A. Eliseyeva, V. N. Panteleeva, P. A. Dementeva, V. V. Shnitova, M. K. Rabchinskiia, D. A. Smirnovb, A. V. Zubovc, A. A. Lebedevad

a Ioffe Institute, 194021 St. Petersburg, Russia
b Institut für Festkorper und Materialphysik, Technische Universitat Dresden, Dresden, Germany
c St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University), 197101 St. Petersburg, Russia
d St. Petersburg State Electrotechnical University LETI, 197376 St. Petersburg, Russia

Abstract: The structural and some other characteristics of quasi-freestanding single-layer graphene obtained by annealing of the buffer layer in the flow of hydrogen are studied in comparison with those of conventional epitaxial graphene. The high structural quality and good lateral uniformity of the thus-obtained graphene film are checked and confirmed by the use of such techniques as Raman spectroscopy, atomic force, and Kelvin probe force microscopies. The confirmation of its single-layer and freestanding character is obtained via the analysis of respective data of $X$-ray photoelectron spectroscopy.

Keywords: silicon carbide, graphene, KPFM, Raman spectroscopy, XPS.

Received: 23.06.2020
Revised: 23.07.2020
Accepted: 27.07.2020

Language: English


 English version:
Semiconductors, 2020, 54:12, 1657–1660


© Steklov Math. Inst. of RAS, 2024