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Fizika i Tekhnika Poluprovodnikov, 2024 Volume 58, Issue 9, Pages 478–481 (Mi phts6784)

International Conference Physics.SPb/2024, October 21-25, 2024, St. Petersburg

The employ of manganese oxide to improve the selectivity of gas sensitive SnO$_x$ films

V. V. Bolotov, E. V. Knyazev, K. E. Ivlev, I. V. Ponomareva, Yu. A. Sten'kin, S. N. Nesov, E. A. Roslikova

Omsk Scientific Center, Siberian Branch of the Russian Academy of Sciences, 644024 Omsk, Russia

Abstract: To improve the selectivity of gas-sensitive SnO$_x$ films, SnO$_x$/MnO$_y$ composite structures were obtained in which manganese oxide plays the role of a NO$_2$ sorbing filter. The microstructure and chemical composition of the films were characterized using scanning electron microscopy and X-ray photoelectron spectroscopy. The structures were tested to detect 5 ppm NO$_2$ at room temperature. The sensory response of SnO$_x$ films in the presence of NO$_2$ decreases by 16 times after coating the MnO$_y$ filter layer.

Keywords: filters, microsensors, manganese oxide, tin dioxide.

Received: 02.05.2024
Revised: 05.08.2024
Accepted: 24.11.2024

DOI: 10.61011/FTP.2024.09.59305.6438A



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