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Fizika i Tekhnika Poluprovodnikov, 2024 Volume 58, Issue 10, Pages 533–536 (Mi phts6795)

International Conference Physics.SPb/2024, October 21-25, 2024, St. Petersburg

Interaction between a silicon nanowires surface and molecules of NH$_3$ and HCl: DFT model and experiment

N. A. Svinkina, V. M. Kondratievab, R. G. Polozkovac, A. D. Bolshakovabd

a Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, 194021 St. Petersburg, Russia
b Moscow Institute of Physics and Technology (National Research University), 141701 Dolgoprudny, Russia
c Peter the Great St. Petersburg Polytechnic University, 195251 St. Petersburg, Russia
d Saint Petersburg State University, 199034 St. Petersburg, Russia

Abstract: Theoretical and experimental studies of the interaction processes of the surface of silicon nanowires with NH$_3$ and HCl molecules have been carried out in connection with the possibility of creating gas sensors that have potential for use in healthcare. The DFT approach has been conducted to show that the experimental results can be explained by the redistribution of the electron density between adsorbed molecules and the silicon surface. It is possible due to the resistive response of Si nanowires to changes in the concentration of NH$_3$ and HCl vapors experimentally established.

Keywords: silicon nanowires, gas sensing, ammonia, hydrochloric acid, DFT.

Received: 03.05.2024
Revised: 24.07.2024
Accepted: 30.10.2024

DOI: 10.61011/FTP.2024.10.59374.6461A



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