S. V. Denisyuk, O. N. Kudanovich, N. I. Mukhurov, A. A. Khodin, E. A. Utkina, M. V. Meledina, T. G. Tabolich, “Comparative morphology and photoluminescence of ZnO films obtained by SILAR and vacuum deposition methods”, Fizika i Tekhnika Poluprovodnikov, 2024, Volume 58, Issue 11,Pages <nobr>587

International Conference Physics.SPb/2024, October 21-25, 2024, St. Petersburg

Comparative morphology and photoluminescence of ZnO films obtained by SILAR and vacuum deposition methods

S. V. Denisyuk^a, O. N. Kudanovich^a, N. I. Mukhurov^a, A. A. Khodin^a, E. A. Utkina^b, M. V. Meledina^b, T. G. Tabolich^c

^a State Scientific and Production Association 'Optics, Optoelectronics and Laser Technology', National Academy of Sciences of Belarus, 220072 Minsk, Republic of Belarus
^b Belarussian State University of Computer Science and Radioelectronic Engineering, 220013 Minsk, Republic of Belarus
^c B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 220072 Minsk, Republic of Belarus

Abstract: Functional zinc oxide layers were obtained on substrates of anodic aluminium oxide with methods SILAR (Successive Ionic Layer Adsorption and Reaction) and thermal oxidation in oxygen-containing medium zinc films deposited in vacuum. Morphology of surface and cleaved facets were studied. Photoluminescence spectra of samples were obtained. Differences in surface structure and optical properties were determined between polycrystalline ZnO films obtained in different conditions.

Keywords: zinc oxide, nanofilaments, photoluminescence, aluminium oxide.

Received: 03.05.2024
Revised: 26.07.2024
Accepted: 30.10.2024

DOI: 10.61011/FTP.2024.11.59479.6549A