Abstract:
New method of chemical-mechanical polishing (CMP) with compositions based on nanometer-sized amorphous silica particles has been developed for the treatment of the surface of single crystals of samarium hexaboride SmB$_6$. It is shown that the CMP method makes it possible to achieve surface roughness of the SmB$_6$ single crystals for a defect-free area with a root-mean-square profile deviation not exceeding 0.8 nm. The effect of the CMP method on the structural and electronic properties of the (100) and (110) surfaces of single-crystal SmB$_6$ samples is discussed.