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Fizika i Tekhnika Poluprovodnikov, 2023 Volume 57, Issue 5, Pages 332–337 (Mi phts6878)

XXVII International Symposium "Nanophysics and Nanoelectronics", Nizhny Novgorod, 13 - 16 March 2023

Formation of InAs nanoislands on silicon surfaces and heterostructures based on them

I. V. Ilkivab, V. V. Lendyashovaac, B. B. Borodinc, V. G. Talalaevd, T. M. Shugabaeva, R. R. Reznikb, G. È. Cirlinabe

a Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, 194021 St. Petersburg, Russia
b Saint Petersburg State University, 199034 St. Petersburg, Russia
c Ioffe Institute, 194021 St. Petersburg, Russia
d Martin Luther University Halle-Wittenberg, 06108 Halle, Germany
e ITMO University, 197101 St. Petersburg, Russia

Abstract: Experimental results of studying the InAs islands formation of silicon surface by molecular beam epitaxy are presented. It has been found that, InAs islands with both bimodal and uniform size distributions can be formed depending on the Si surface relief and the presence of nanopits. The possibility of fabricating heterostructures with InAs quantum dots demonstrating photoluminescence in the region of 1.65 $\mu$m, was showed.

Keywords: quantum dots, molecular beam epitaxy, semiconductors, silicon, heterostructures.

Received: 05.05.2023
Revised: 29.06.2023
Accepted: 06.07.2023

DOI: 10.21883/FTP.2023.05.56199.26k



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