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Fizika i Tekhnika Poluprovodnikov, 2023 Volume 57, Issue 7, Pages 530–533 (Mi phts6913)

International Physics Conference, St. Petersburg, October 23-27, 2023, St. Petersburg

Features of InP on Si nanowire growth

L. B. Karlinaa, A. S. Vlasova, I. V. Ilkivb, A. V. Vershininb, I. P. Sotnikovabc

a Ioffe Institute, 194021 St. Petersburg, Russia
b Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, 194021 St. Petersburg, Russia
c Institute for Analytical Instrumentation, Russian Academy of Sciences, 198095 St. Petersburg, Russia

Abstract: The possibility of InP nanowhiskers growth from the saturated phosphorus and indium vapors with V/III ratio of 8–10 in a quasi-closed volume on (111) oriented silicon substrates with a natural oxide layer 2–2.5 nm has been demonstrated. The growth of InP nanowhiskers from Au–In–P catalytic droplets formed during the initial period is reported. Optical studies confirmed the formation of InP nanostructures upon the Si surface. The nanostructures exhibit a high doping level presumably with tin atoms.

Keywords: InP nanowires, growth from vapor phase, III–V on Si.

Received: 11.05.2023
Revised: 11.07.2023
Accepted: 30.10.2023

DOI: 10.61011/FTP.2023.07.56783.5037C



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