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Fizika i Tekhnika Poluprovodnikov, 2022 Volume 56, Issue 2, Pages 199–203 (Mi phts6996)

This article is cited in 1 paper

Electronic properties of semiconductors

Effect of the presence of a sufficiently high phosphorus concentration on the concentration distribution of gallium in silicon

M. K. Bahadirkhanov, N. F. Zikrillaev, S. B. Isamov, Kh. S. Turekeev, S. A. Valiev

Tashkent State Technical University, 100095 Tashkent, Uzbekistan

Abstract: It was found that the silicon preliminarily doped with a high concentration of phosphorus during the diffusion of gallium, there is a significant increase in the solubility of the gallium. The results obtained are explained by the interaction of gallium and phosphorus atoms, as a result of which quasi-neutral molecules [P$^+$Ga$^-$] are formed. It is assumed that the formation of such quasineutral molecules [P$^+$Ga$^-$] stimulates the formation of Si$_2$GaP binary unit cells in the silicon lattice. It is shown that a sufficiently high concentration of such unit cells can lead to a significant change in the electrophysical parameters of silicon, i.e. the possibility of obtaining a new material based on silicon.

Keywords: silicon, gallium, phosphorus, binary cell, diffusion.

Received: 09.04.2021
Revised: 11.09.2021
Accepted: 20.09.2021

DOI: 10.21883/FTP.2022.02.51962.9666



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