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Fizika i Tekhnika Poluprovodnikov, 2022 Volume 56, Issue 6, Pages 601–606 (Mi phts7067)

Semiconductor physics

Study of the spatial characteristics of emission of surface-emitting ring quantum-cascade lasers

A. V. Babicheva, D. A. Mikhailovb, D. V. Chistyakovb, E. S. Kolodeznyia, A. G. Gladysheva, G. V. Voznyukb, M. I. Mitrofanovbc, D. V. Denisovd, S. O. Slipchenkob, A. V. Lyutetskiyb, V. V. Dyudelevb, V. P. Evtikhievb, L. Ya. Karachinskya, I. I. Novikova, N. A. Pikhtinb, A. Yu. Egorove, G. S. Sokolovskiib

a ITMO University, 197101 St. Petersburg, Russia
b Ioffe Institute, 194021 St. Petersburg, Russia
c Submicron Heterostructures for Microelectronics Research and Engineering Center, Russian Academy of Sciences, 194021 St. Petersburg, Russia
d Saint Petersburg Electrotechnical University "LETI", 197022 St. Petersburg, Russia
e Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, 194021 St. Petersburg, Russia

Abstract: The results of studies of ring quantum-cascade lasers with surface emission due to a second-order grating formed in the top cladding layers are presented. Surface emission near 7.85 $\mu$m with a low threshold current density (3.8 kA/cm$^2$), in comparison with ridge quantum-cascade lasers of the same cavity length is demonstrated. The results of measurements of the intensity distribution of the near and far fields at different pumping levels are presented. The estimated value of the angle of beam extraction relative to the surface normal is in the range (5.7–6.7)$^\circ$ .

Keywords: ring cavity, grating, focused ion beam (FIB) etching, superlattices, quantum-cascade laser, epitaxy, indium phosphide.

Received: 01.03.2022
Revised: 24.03.2022
Accepted: 24.03.2022

DOI: 10.21883/FTP.2022.06.52597.9825



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