Study of triboelectric charges in thin dielectric and semiconductor films by SPM methods

SPM studies of triboelectric charges on thin films of high-k dielectrics LaScO$_3$, semiconductor “flakes” MoSe$_2$, and ferroelectric PZT films have been carried out. It is shown that the value of the accumulated triboelectric charge in these films depends on their thickness. The strongest effect is observed in the LaScO$_3$ film 6 nm thick and the PZT film 100 nm thick. The dependence of the value of the measured triboelectric potential on the loading force and the material of the probe was also experimentally found.