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Fizika i Tekhnika Poluprovodnikov, 2022 Volume 56, Issue 9, Pages 908–914 (Mi phts7124)

This article is cited in 1 paper

Semiconductor physics

Surface-emitting quantum-cascade lasers with a grating formed by focused ion beam milling

A. V. Babicheva, D. A. Mikhailovb, E. S. Kolodeznyia, A. G. Gladysheva, G. V. Voznyukb, M. I. Mitrofanovbc, D. V. Denisovd, S. O. Slipchenkob, A. V. Lyutetskiyb, V. V. Dyudelevb, V. P. Evtikhievb, L. Ya. Karachinskya, I. I. Novikova, G. S. Sokolovskiib, N. A. Pikhtinb, A. Yu. Egorove

a ITMO University, 197101 St. Petersburg, Russia
b Ioffe Institute, 194021 St. Petersburg, Russia
c Submicron Heterostructures for Microelectronics Research and Engineering Center, Russian Academy of Sciences, 194021 St. Petersburg, Russia
d Saint Petersburg Electrotechnical University "LETI", 197022 St. Petersburg, Russia
e Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, 194021 St. Petersburg, Russia

Abstract: The results of studies of 7.5–8.0 $\mu$m range surface-emitting ring quantum-cascade lasers are presented. A second-order diffraction grating with a calculated coupling coefficient of $\sim$9 cm$^{-1}$ is formed on the entire surface of the ring cavity by focused ion beam milling. Surface-emitting lasing at room temperature near 7.75 $\mu$m with a threshold current density of $\sim$8 kA/cm$^2$ and an outer radius of the ring cavity of 202 $\mu$m is demonstrated. The results of studying the intensity distribution in the far-field near the normal to the surface showed the presence of two maxima. It is shown that the implemented coupling coefficient is not sufficient to ensure single-mode lasing in the studied ring quantum-cascade lasers.

Keywords: superlattices, quantum-cascade laser, epitaxy, indium phosphide, focused ion beam milling.

Received: 18.04.2022
Revised: 25.06.2022
Accepted: 05.07.2022

DOI: 10.21883/FTP.2022.09.53414.9857


 English version:
Semiconductors, 2023, 57:10, 445–450

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© Steklov Math. Inst. of RAS, 2025